t-Nova-850/1550TN
Ultrafast thickness measurement sensor
Products Non contact thickness sensor t-Nova-850/1550TN
- Simultaneous measurement of physical thickness and refractive index
- Vibration insensitive measurement
- High speed and High precision measurement
- Wide applicability to various substrate materials (Glass, Silicon wafer, etc.)
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External structure -
Measurement -
Measurement -
Measurement
Specification
| Wavelength range | 750 nm - 950 nmㅤ/ㅤ1490 nm - 1610 nm |
|---|---|
| Thickness measurement resolution | <10 nm, Refractive index : 10^-3 |
| Thickness measurement range (General glass) | 6 μm - 1.2 mm / 20 μm - 3 mm |
| Maximum Measurement speed | 250 kHz / 40 kHz |
| Measuring tolerance angle | <±5º |
| Measurement principle | Spectral-domain interferometry |
| Standard specimen | KRISS standard thickness specimen provided |
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